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Dielectric elastomers(DEs)show complex mechanical behaviors with different boundary conditions,geometry sizes,and prestress.In this study,a three-component linear visco-hyperelastic model of DE film is developed based on equibiaxial tension.By applying hereditary integrals to analyze multiple-segment loading processesof film stretching,the model parameters are extracted by fitting the visco-hyperelastic film model to the experimental data.To demonstrate the performance of proposed model,the obtained predictive results are compared with the experimental results under different equibiaxial loading conditions.The good agreement between them shows that the linear visco-hyperelastic model is a promising tool for analytically investigating the property of pre-stretched DE actuators.Finally,the Prony series coefficients are calculated according to the relaxation function.This is helpful for simulation analysis using commercial finite element software.