论文部分内容阅读
微机电系统(MEMS)技术的基础是由微电子加工技术发展起来的微结构加工技术,包括表面微加工技术和体微加工技术。其中体微加工技术是微传感器、微执行器制造中最重要的加工技术。该文主要介绍以加工金属、聚合物以及陶瓷为主的LIGA技术,先进硅刻蚀技术(ASE)和石英晶体深槽湿法刻蚀技术。最后给出用LIGA技术和牺牲层技术制作微加速度传感器的例子。
Microelectromechanical system (MEMS) technology is based on micro-machining technology developed by the micro-structure processing technology, including surface micro-machining and micro-body processing technology. Body micro-machining technology which is the micro-sensor, micro-actuator manufacturing the most important processing technology. This article mainly introduces LIGA technology, advanced silicon etching technology (ASE) and quartz crystal deep groove wet etching technology which are mainly made of metal, polymer and ceramic. Finally, an example of making micro-acceleration sensors using LIGA technology and sacrificial layer technology is given.