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利用FIB/SEM切片、XRD、TEM和EDX、EELS等先进分析技术对微球模板法所制备的Au/Ag泡沫材料的微观结构、形貌、成分及成分分布等进行了细致的研究。结果表明:由微球状Au/Ag球壳堆积而成的泡沫材料中微球直径约8 m,微球壁厚200~1200 nm;Au/Ag泡沫材料的球壳可细分为3层,内层和外层为Au/Ag合金的微粒,中间主要是非晶碳层,夹杂有少量的Au/Ag微粒;Au/Ag泡沫材料的骨架由单个空心球壳组成,球壳之间通过接触点的金属镀层连接在一起;球壳上有小孔状结构,是在热分解法去除聚苯乙烯微球模板时形成的;球壳壁厚分布不均匀,少数球壳有塌陷、变形、破裂等现象。这些详细的分析有助于改进工艺,提高Au/Ag泡沫材料的制备质量。
The microstructure, morphology, composition and composition distribution of the Au / Ag foam prepared by the microsphere template method were investigated by using FIB / SEM sections, XRD, TEM and EDX, EELS and other advanced analytical techniques. The results show that the diameter of microspheres is about 8 m and the diameter of microspheres is 200 ~ 1200 nm. The spherical shell of Au / Ag foam can be subdivided into three layers, Layer and the outer layer of Au / Ag alloy particles, the middle is mainly amorphous carbon layer, mixed with a small amount of Au / Ag particles; Au / Ag foam skeleton consists of a single hollow spherical shell, the contact between the shell through the shell The metal coating is connected together; the small spherical structure on the spherical shell is formed when the polystyrene microsphere template is removed by thermal decomposition; the distribution of the spherical shell wall thickness is not uniform and the collapse, deformation and rupture of a few spherical shells . These detailed analyzes help to improve the process and improve the quality of Au / Ag foam preparation.