Microlens fabricated in silicon on insulator using porous silicon

来源 :Optoelectronics Letters | 被引量 : 0次 | 上传用户:vivi8133
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
In order to realize the planar gradient refractive index (GRIN) microlens which is based upon porous silicon (PSi) and fabricated on silicon on insulator (SOI), a novel anodization method is used by applying lateral electric field. The microlens with smooth variation of the effective optical thickness is achieved. The lens is transparent in the infrared region, including the optical communication window (1.3 μm<λ<1.6 μm). This approach also allows the fabrication of an array of such lenses on SOI, and the GRIN microlens can be used as potential components in future silicon-based integrated optical circuits. In order to realize the planar gradient refractive index (GRIN) microlens which is based upon porous silicon (PSi) and fabricated on silicon on insulator (SOI), a novel anodization method is used by applying lateral electric field. The microlens with smooth variation of The effective optical thickness is achieved. The lens is also transparent to the infrared region, including the optical communication window (1.3 μm <λ <1.6 μm). This approach also allows the fabrication of an array of such lenses on SOI, and the GRIN microlens can be used as potential components in future silicon-based integrated optical circuits.
其他文献
河南省廊坊地区水利部门自1982年经有关上级部门批准,建立县级水利公安派出所以来,有效地制止了人为破坏水利工程和偷盗水利设备的现象,收到显著效果。目前,全地区八县一市
70年代有应用高剂量环磷酰胺(HD-CTX)异体骨髓移植治疗急性再障(SAA)的预处理方案后,骨髓移植未能成功,但自身骨髓造血组织恢复正常。最近Robert(1996年)介绍了应用HD-CTX治
The crystal structure of astrophyllite K2Na(Fe, Mn, Mg, □)7[Ti2(Si4O12)2|O3](OH, F)4 has been refined. The dimensions of the triclinic unit cell are: a = 0.535
We investigate the effect of disorder and mechanical deformation on a two-dimensional photonic crystal waveguide. The dispersion characteristics and transmittan
GaN/InGaN superlattice barriers are used in InGaN-based light-emitting diodes (LEDs). The electrostatic field in the quantum wells, electron hole wavefunction o
本文通过分析非英语专业高职生的心理和英语学习状况,提出要改变高职教育的现状,提高学生学习英语的兴趣,首先,要帮助高职生端正学习动机,树立学习信心,用美好前途激励学生重
1988年5月至1998年6月,我们共收治过敏性紫癜80例,总结分析如下。 1 临床资料 1.1 一般资料:男48例,女32例。
关于珠江三角洲形成和演变的历史过程,不少学者作过研究[1—11],但这些研究主要是从地学角度上作一般过程的论述。本文则着重在分析沉积相的基础上,先就珠江三角洲形成过程作
The metamorphic complex of the Julin Group occurs in the Yuanmou area of Yunnan Province on the western margin of the Yangtze Platform, and connects with the Ka
本文提出水电站水库优化调度选优的改变约束法,以达到满足水电站群设计保证率要求和发电量最大,並用于黄河上游刘家峡、盐锅峡、八盘峡、青铜峡梯级水电站水库优化调度,保证