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现场采集ＰＥＴＥＯＳ发射光谱，分析和研究用等离子体正硅酸乙酯淀积氧化硅反应的机理和产物，并初步探究如何达到工艺控制，应用于生产的问题。
PETEOS emission spectra were collected on site, and the mechanism and products of silicon dioxide deposition by plasma TEOS were analyzed and studied. The problems of how to achieve process control and apply to production were discussed.