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随着宇航、计算机、微电子、智能系统和兵器等技术的飞跃发展,不少零件的精度超出了经典的几何精度的“精密”概念,如高于0.05微米的圆度和0.1角秒的分度误差等。这些零件的加工和检验,主轴回转精度起着极其重要的作用。因此,国内外很重视这方面的研究,而且取得很高的精度。如日本超精密车床主轴径向
With advances in aerospace, computer, microelectronics, intelligent systems, and weapons, many parts go beyond the precision of classic “precision” concepts such as roundness above 0.05 microns and fractions of 0.1 arcsec Degree of error and so on. The machining and inspection of these parts, spindle rotation accuracy plays an extremely important role. Therefore, both at home and abroad attach great importance to this aspect of research and achieve high precision. Such as Japan’s ultra-precision lathe spindle radial