一、引言Beckmann 关于电磁波在粗糙表面上散射的研究,为测量远场散射光来估算表面粗度的光学方法提供理论根据。Beckmann 的理论确定了在反射方向和偏离反射方向上散射光的平均强度。概括地说,在反射方向上的散射光给出了关于表面高度 I. INTRODUCTION Beckmann’s research on the scattering of electromagnetic waves on rough surfaces provides the theoretical basis for the optical method of measuring surface roughness by measuring far-field scattered light. Beckmann’s theory determines the average intensity of scattered light in the direction of reflection and off-reflection. In summary, scattered light in the direction of reflection gives information about the surface height