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介绍一种以多晶硅薄膜为敏感材料的压力传感器。该传感器利用了双岛结构膜片的应力集中效应，灵敏度得到提高，且具有良好的线性度和过载能力。
A pressure sensor based on polycrystalline silicon film is introduced. The sensor utilizes the stress concentration effect of the double-island structure diaphragm, improves the sensitivity, and has good linearity and overload capability.