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根据偏振光的琼斯矩阵理论,分析了一种基于二维光栅分光的同步移相干涉测量系统的工作原理。从干涉系统、分光系统以及移相系统三个部分详细研究了该系统的误差产生原因和作用机理,并针对各种误差源提出了相应的解决办法,为同步移相干涉测量系统中光学元件的选择、光路的调整及其误差的补偿提供了理论依据。结果表明,干涉部分的误差影响较小,可以通过光路的设计降低分光部分的误差;移相系统的误差最大,必须要对移相误差进行标定。
According to the Jones matrix theory of polarized light, a working principle of a synchronous phase shift interferometry system based on two-dimensional grating spectroscopy is analyzed. The error causes and mechanism of the system are studied in detail from the three parts of the interference system, the spectroscopic system and the phase-shifting system. Corresponding solutions to various error sources are put forward, which are the key technologies for the optical components in the synchronous phase-shifting interferometry system Choice, adjustment of light path and compensation of error provide theoretical basis. The results show that the error of the interfering part is less affected, and the error of the spectroscopic part can be reduced by designing the optical path. The error of the phase shifting system is the largest and the phase error must be calibrated.