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Diamond-like carbon (DLC) films have been deposited using pure CH4 generated in a surface wave plasma equipment, where a hot filament is used to make the discharge easily and provides a certain amount of heat feeding to the samples. The deposited films are charac- terized by Raman spectrum, scanning electronic microscopy and infrared absorption spectrum techniques. The electron density increases with the filament current and the Raman signal is stronger and sharper with a current adding to the filament, indicating that the hot filament can improve film quality by increasing the electron density. Meanwhile, films with stronger and sharper Raman peaks around 1332 cm-1 and 1600 cm-1, denser and size-unchanging clusters, and obvious stretching mode of CH3 or CH2 under a direct current (dc) bias of -60 V are shown respectively by Raman spectrum, scanning electronic microscopy photos and infrared absorption spectrum. The content calculated by decomposition of Raman spectrum of the film is 44% under the dc bias of -60 V.
Diamond-like carbon (DLC) films have been deposited using pure CH4 generated in a surface wave plasma equipment, where to make the discharge easily and provide a certain amount of heat feeding to the samples. The deposited films are charac - terized by Raman spectrum, scanning electronic microscopy and infrared absorption spectrum techniques. The electron density precursors are: a. the electron density. Meanwhile, films with stronger and sharper Raman peaks around 1332 cm-1 and 1600 cm-1, denser and size-unchanging clusters, and significantly stretching mode of CH3 or CH2 under a direct current (dc) bias of -60 V are shown respectively by Raman spectrum, scanning electronic microscopy photos and infrared absorption spectrum. The content calculated by decomposition of Raman spectrum of the film is 4 4% under the dc bias of -60 V.