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本文通过理论计算、实验校验,定量地研究了坩埚对硅单晶质量的影响,提出了高纯涂层石英拉晶工艺。
In this paper, the effect of crucible on the quality of silicon single crystal has been studied theoretically and experimentally, and the high-purity coated quartz crystal pulling technology has been proposed.