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本文主要介绍了一种闭锁电热微开关的制备及性能测试。利用双层膜电热微驱动器,基于双悬臂梁的结构设计,实现开关的驱动和闭锁。采用MEMS表面微加工技术完成所设计微开关器件的制备,并对其进行性能测试。结果表明,施加的脉冲电信号的最佳占空比为10%,并测得电阻丝能承受的最大功耗为90mW,单臂梁的翘曲高度为58μm,所得结果能够满足设计的闭锁电热微开关的工作需要。将本次设计的微开关连接到外接电路中,并施加时序双脉冲电信号,测得了外接电路的导通信号。
This article mainly introduces the preparation and performance testing of a latching electrothermal micro switch. Based on the double cantilever structure design, the double-layer electrothermal microactuator is used to drive and block the switch. The MEMS micro-fabrication technology is used to fabricate the micro-switch device, and its performance is tested. The results show that the optimal duty cycle of the applied pulse signal is 10%, the maximum power dissipation of the resistance wire is 90mW and the warp height of the arm beam is 58μm. The obtained results can satisfy the design of blocking heat Micro-switch work needs. The design of the micro-switch connected to the external circuit, and the application of timing double pulse electrical signal, measured the external circuit on signal.