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提出了一种激光诱导液相腐蚀新方法———次序选择腐蚀法。次序选择腐蚀是指在激光化学液相腐蚀中,腐蚀溶剂不是混合后同时作用于基片,而是按照溶剂的性能,分先后对基片进行腐蚀。实质上是采用微处理(表面处理)再进行混合液相激光辅助下的腐蚀。理论分析和实验结果都表明,与国内外研究普遍采用的混合溶剂腐蚀法相比,次序选择腐蚀可以有效地提高腐蚀表面的均匀性;因先采用H2O2对基片进行化学腐蚀处理,大大缩短了激光化学腐蚀的时间;利用溶剂分开,降低了激光化学腐蚀对混合溶剂精确配比的要求,使激光化学腐蚀控制和分析更加简单。这种方法可以克服常规方法的诸多弊端,提高腐蚀性能,在特殊结构光电器件和光电集成中具有广泛的应用前景。
A new method of laser-induced liquid phase corrosion is proposed, which is sequential selective etching. In order to select the corrosion is the liquid chemical etching in the laser, the corrosion solvent is not mixed at the same time acting on the substrate, but in accordance with the performance of the solvent, the substrate has been sub-corrosion. In essence, the use of micro-processing (surface treatment) and then mixed liquid-phase laser-assisted corrosion. Theoretical analysis and experimental results show that compared with the commonly used mixed solvent etching method in domestic and foreign research, the selective etching can effectively improve the uniformity of the corrosion surface. The chemical etching of the substrate with H2O2 greatly shortens the laser Chemical etching time; the use of solvent separation, reducing the laser chemical etching on the exact ratio of the mixed solvent requirements, the laser chemical etching control and analysis easier. This method can overcome the disadvantages of the conventional methods and improve the corrosion performance, and has a wide range of application prospects in the special structure of optoelectronic devices and optoelectronic integration.