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利用MEMS技术,首次在硅基芯片上加工制作了梯形截面的微型振荡热管.借助摄像机,对以FC-72为工质的两个通道水力直径分别为352μm(#1)和394μm(#2)的微型振荡热管的启动和稳定情况下的运动特征和流型等进行了可视化观察.结果发现微型振荡热管的启动相当迅速,在启动过程中没有观察到明显的核化现象,蒸发段内的汽塞主要通过液塞断裂而产生;进入稳定阶段后,微型振荡热管对倾斜角度的适应性较强,在10°~90°的范围都可实现持续稳定的大幅振荡,但只在#2热管内明显地观察到工质的单向循环运动.实验中观察到泡状流、塞状流、环状流、半环状流和波环状流等,而核态沸腾只发生在#2热管的蒸发段,在其冷凝段还观察到了喷射流.
The micro-oscillation heat pipe with trapezoid cross-section was machined on the silicon substrate for the first time by using MEMS technology.With the help of the camera, the hydraulic diameters of the two channels working with FC-72 were 352μm (# 1) and 394μm (# 2) Of the micro-oscillation heat pipe in the start-up and stability of the movement characteristics and flow patterns were observed.It was found that the micro-oscillation heat pipe to start quite quickly, did not start during the apparent nuclear phenomenon, the evaporation section of the steam The plug is mainly produced by liquid plug breakage. After entering the stabilization phase, the miniature oscillating heat pipe is more adaptable to the tilt angle and can achieve a sustained and stable large oscillation in the range of 10 ° -90 °, but only in the # 2 heat pipe Obviously, one-way circulation of working fluid was observed. Bubble flow, plug flow, annular flow, semi-annular flow and annular flow were observed in the experiment. Nucleate boiling occurred only in the # 2 heat pipe Evaporation section, in its condensation section also observed jet.