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根据Fabry-Prot(F-P)腔的干涉原理,采用微机电系统(MEMS)工艺,研制出一种用于义齿压力检测的F-P腔光纤微型压力传感器。传感器膜片厚为6μm,膜片边长为100μm。在与义齿基托相同材料的树脂底基上,挖边长为1.2mm、深度为0.8mm平整的方形小坑,将传感器分布式埋植入底基,并用自制的施加压力的装置对传感器加压测试。用双波长方法解调干涉信号,用阵列波导光栅(AWG)复用传感器,从而实现对口腔义齿下方组织压力的分布式测量。测量结果表明,当义齿加载0～0.6MPa压力时,系统的相对反射率比值/压力可达0.020 1/MPa,测量结果具有良好的线性度,测量系统的复用能力强,且复用传感器之间没有串扰,适用于义齿对口腔下方组织压力的分布式测量。
According to the interference principle of Fabry-Prot (F-P) cavity, an F-P cavity optical fiber micro-pressure sensor for pressure detection of denture was developed by MEMS technology. Sensor diaphragm thickness of 6μm, diaphragm length of 100μm. On the resin base of the same material as the denture base, a square pit of 1.2 mm in length and 0.8 mm in depth was excavated. The sensor was distributedly embedded in the substrate and the pressure applied by the device was applied to the sensor plus Pressure test. Interferometric signals were demodulated using a dual-wavelength method and sensors were multiplexed with arrayed waveguide gratings (AWGs) to achieve a distributed measurement of tissue pressure beneath the oral denture. The measurement results show that when the denture is loaded with 0 ~ 0.6MPa pressure, the relative reflectance ratio / pressure of the system can reach 0.020 1 / MPa, the measurement results have good linearity, the multiplexing capability of the measurement system is strong, and the multiplexed sensor There is no crosstalk between them, which is suitable for distributed measurement of the tissue pressure under the oral cavity of the denture.