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研究了脉冲激光烧蚀靶材的整个过程 .从包含热源项的导热方程出发 ,利用适当的动态边界条件 ,详细研究了靶材在熔融前后的温度分布规律 ,并且给出了熔融后的固、液分界面的变化规律 .熔融后的温度演化规律和固液相界面均以解析表达式的形式给出 .还根据能量平衡原理给出烧蚀面位置随时间的变化规律 .以硅靶材为例计算模拟了激光烧蚀的整个过程 ,与实验结果符合较好 .
The whole process of pulsed laser ablation of target is studied. Starting from the thermal conductivity equation including heat source term, the temperature distribution rules of target before and after melting are studied in detail by using appropriate dynamic boundary conditions. Liquid interface change law.The evolution of temperature after melting and solid-liquid interface are given in the form of analytical expressions.According to the energy balance principle is given ablation surface position with time variation.The silicon target is Example calculation simulates the whole process of laser ablation, which is in good agreement with the experimental results.