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借助微透镜及其阵列的光学器件,采用软刻蚀技术中的微模型方法成功制备了聚甲基丙烯酸甲酯(PMMA)的柱体及球面微透镜阵列,并对该微透镜阵列进行了光学显微和SEM分析．通过考察制备过程中的影响因素,探讨了减少阵列缺陷和提高光学性能的适宜参数．并对该透镜阵列的光学成像性能进行了初步研究．
With the help of the micro-lens and its array of optics, the PMMA cylinder and spherical microlens array were successfully prepared by micro-modeling in soft etching technology. The microlens array was optically Microscopy and SEM analysis. By examining the influencing factors in the preparation process, suitable parameters for reducing array defects and improving optical properties were discussed. The optical imaging performance of this lens array has been studied.