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随着透明电子器件和柔性显示器的发展,柔性透明导电薄膜正在受到越来越多的关注。采用射频磁控溅射法在柔性衬底上低温沉积高透过率、低电阻率的CdO薄膜。研究了O2流量对薄膜的结晶性能、光学性质和导电性能的影响。研究结果表明,室温下沉积的CdO薄膜均为结晶性能良好的立方结构薄膜,(200)取向性明显。另一方面,O2流量对CdO薄膜的光电性能有很大的影响。O2流量过小时,薄膜的透光率较差,而当O2流量较大时,薄膜的电阻率较大,当O2流量大于3 cm3/min时,光学透光率不再有大的变化。
With the development of transparent electronic devices and flexible displays, flexible transparent conductive films are receiving more and more attention. Radio frequency magnetron sputtering was used to deposit CdO film with high transmittance and low resistivity on flexible substrate at low temperature. The effects of O2 flux on the crystallinity, optical properties and electrical conductivity of the films were investigated. The results show that CdO thin films deposited at room temperature are all cubic crystalline films with good crystallinity. The (200) orientation is obvious. On the other hand, O2 flow has a great influence on the photoelectric properties of CdO thin films. When the O2 flow rate is too small, the light transmittance of the film is poor. When the O2 flow rate is large, the resistivity of the film is larger. When the O2 flow rate is more than 3 cm3 / min, the optical transmittance does not change much.