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本文介绍了一种用于有源矩阵液晶显示、具有对称结构的ＭＩＭ薄膜二极管，其中Ｔａ２Ｏ５膜采用溅射／阳极氧化两步法制成。实验结果表明，用此法制备的氧化钽膜作绝缘层的ＭＩＭ二极管，具有良好的开关特性，较大的通断比和较好的伏安特性对称性
In this paper, a MIM thin film diode with symmetric structure for active matrix liquid crystal display is introduced. The Ta2O5 film is fabricated by a two-step sputtering / anodization process. The experimental results show that the MIM diode with the tantalum oxide film as insulating layer has good switching characteristics, large on-off ratio and good symmetry