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本文对 PCl_3-H_2-In 体系外延生长的热力学进行了计算。对影响外延生长速度的因素进行了详尽的讨论,发现竞争生长是影响生长速度重复性的重要因素。给出了铟舟状态对外延层纵向浓度分布影响的实验结果。并就衬底制备、工艺条件对迁移率的影响进行了讨论。
In this paper, the thermodynamics of epitaxial growth of PCl_3-H_2-In system are calculated. The influencing factors of epitaxial growth are discussed in detail, and it is found that competitive growth is an important factor affecting the reproducibility of growth rate. The experimental results of the influence of indium boat state on the vertical concentration distribution of epitaxial layer are given. The effects of substrate preparation and process conditions on mobility are also discussed.