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可编程相位光栅技术在光通讯领域有较广的应用,也可作为微型光谱仪的新颖色散器件。该文设计了一种基于MEMS的可编程相位光栅,其特征参数可以通过编程控制和改变。通过经典理论建模与分析,设计了可编程相位光栅的结构;并对光栅的光带结构参数进行了优化,从而有利于可编程相位光栅功能的实现,提高了制作的可靠性和成功率;设计了针对可编程相位光栅的表面硅微工艺,并对改善应力、去牺牲层和防粘连等关键问题进行了分析,改进了工艺,成功研制出样品,其结构尺寸约为4mm×6mm,有效工作部分的面积约为4mm×2mm.
Programmable phase grating technology in the field of optical communication has a wide range of applications, but also as a novel micro-spectrometer dispersion device. This paper designs a MEMS-based programmable phase grating whose characteristic parameters can be controlled and changed by programming. Through the modeling and analysis of classical theory, the structure of programmable phase grating is designed. The parameters of the optical band structure of the grating are optimized, which is in favor of the realization of the programmable phase grating function and the fabrication reliability and success rate. The surface silicon micro-process for programmable phase grating is designed, and the key problems of improving stress, sacrificial layer and anti-blocking are analyzed, the process is improved and the sample is successfully developed. The structure size is about 4mm × 6mm, which is effective Working area of about 4mm × 2mm.