提出了系统诊断方法：建立完整的电镜功能系统，把握正确的故障特征，可以准确、迅速地将故障从大的范围逐步缩小到尽可能小的范围内．对于小范围的故障，运用其它方法容易找出故障点所在．因此，系统诊断方法是处理复杂故障的一种快捷、有效的方法 The system diagnosis method is proposed: to establish a complete system of electron microscope functions and grasp the correct fault characteristics, the fault can be accurately and rapidly reduced from a large area to a small area as much as possible. For a small range of faults, the use of other methods easily find the point of failure. Therefore, the system diagnosis method is a quick and effective way to deal with complex faults