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用电弧离子镀技术在TC4钛合金基体上通过改变偏压制备了4组TiN/CrN薄膜,对薄膜的表面形貌、厚度、相结构、硬度、膜基结合力和摩擦系数等组织、性能进行了测试表征。结果表明,薄膜是由TiN相和CrN交替叠加构成的纳米多层薄膜,薄膜的调制周期为60 nm,总的厚度约为480 nm。与基体钛合金相比,镀膜后样品的表面性能与偏压幅值密切相关并有显著提高:显微硬度从基体的3 GPa提高到16.5~24.7 GPa;摩擦系数从基体的0.35大幅度降低到0.14~0.17;薄膜与基体结合牢固,膜基临界载荷在60~80N之间。经电弧离子镀TiN/CrN纳米多层薄膜处理后,TC4钛合金可以满足沙粒和尘埃磨损条件下的耐磨性能要求。
Four groups of TiN / CrN thin films were prepared by arc ion plating on TC4 titanium alloy substrate by changing the bias voltage. The microstructure and properties of the films such as surface morphology, thickness, phase structure, hardness, film-based bond strength and friction coefficient The test characterization. The results show that the film is composed of TiN phase and CrN alternately superimposed to form a nano-multilayer film with a modulation period of 60 nm and a total thickness of about 480 nm. Compared with the matrix titanium alloy, the surface properties of the samples after coating were closely related to the bias voltage and significantly increased: the microhardness increased from 3 GPa to 16.5-24.7 GPa; the friction coefficient decreased from 0.35 to 0.14 ~ 0.17; The combination of film and matrix is firm, the critical load of film matrix is between 60 ~ 80N. After arc ion plating TiN / CrN nano-multilayer film treatment, TC4 titanium alloy can meet the wear resistance requirements of sand and dust wear conditions.