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为减小尺寸变异对微陀螺仪抗冲击性能的影响,以MEMS环形陀螺仪为研究对象,应用有限元显式动力学分析技术和试验设计方法,通过显著性分析方法研究了各设计参数变异对抗冲击性能的影响,并从中筛选出合理设计变量,进而以最大冲击应力与性能变异的最小化为目标,建立了环形陀螺仪抗冲击稳健性优化的数学模型,并通过Pareto多目标遗传算法获得最优设计参数。仿真验证表明采用该设计方法可使环形微机械陀螺在满足正常工作性能的同时,使其抗冲击性能的稳健性也得到明显改善,为微陀螺仪抗冲击设计提供了新的有效方法。
In order to reduce the impact of size variation on the impact resistance of micro-gyroscopes, the MEMS ring gyroscope was used as the research object. The finite element explicit dynamic analysis technique and experimental design method were used to study the variation of design parameters Impact performance and filter out the reasonable design variables, and then the maximum impact stress and performance variation minimization as the goal, to establish a robust optimization of the ring gyroscope shock resistance mathematical model and obtained by Pareto multi-objective genetic algorithm Excellent design parameters. The simulation results show that this design method can make the ring micromechanical gyroscope not only improve the robustness of the impact resistance but also provide a new effective method for the impact resistance design of the microgyroscope while satisfying the normal working performance.