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对直流电弧等离子体ＣＶＤ制备的金刚石薄膜的介电性能进行了研究，结果表明，金刚石薄膜的介电性能主要取决于样品的多晶性质以及表面和晶界处的非金刚石相和杂质成分
The dielectric properties of diamond films prepared by DC arc plasma CVD were studied. The results show that the dielectric properties of diamond films mainly depend on the polycrystalline nature of the samples and the non-diamond phase and impurity components