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在自动控制系统中采用的电液、气电伺服阀精度很高,测量困难。本文提出了用喷嘴盖板式气动测量方法有效地解决这一难题。用该方法制成的仪器可达到指标:(1)重复测量精度为 0.1微米;(2)仪器稳定性为0.1微米;(3)仪器测单件重复性误差为3σ=0.2微米;(4)不同时间,不同条件的重复精度为0.4微米;(5)仪器的分辨率为0.1微米。
In the automatic control system used in electro-hydraulic, pneumatic servo valve high accuracy, measurement difficulties. This paper presents a nozzle cover plate pneumatic measurement method effectively solve this problem. (2) the stability of the instrument is 0.1 micrometer; (3) the repeatability error of the single piece of the instrument is 3σ = 0.2 micrometer; (4) the accuracy of the measurement is 0.1 micrometer; At different times, the repeatability of different conditions is 0.4 μm; (5) The resolution of the instrument is 0.1 μm.