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Rudolph Technologies日前宣布将为光刻设备供应商ASML Holding NV(ASML)提供边缘检测工具,助其提升浸没式光刻工艺中晶圆缺陷检测控制过程,使浸没式光刻生产能力最大化。
Rudolph Technologies today announced that it will provide lithography equipment supplier ASML Holding NV (ASML) with edge detection tools to enhance wafer defect inspection control in immersion lithography to maximize immersion lithography productivity.