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用X射线双晶衍射法测量了(111)晶面的CdTe及外延MCT层的完整性,结果表明CdTe径向晶格常数的一致性差是其完整性低的主要原因。MCT外延层完整性差不仅与径向晶格常数的一致性差有关,而且对小范围内的完整性也有较大影响,生长条件有待进一步改善。
The completeness of CdTe and epitaxial MCT layers of (111) crystal plane was measured by X-ray double crystal diffraction method. The results show that the poor uniformity of CdTe crystal lattice constant is the main reason for the low completeness. The poor integrity of the MCT epitaxial layer is not only related to the poor consistency of the radial lattice constant, but also has a great influence on the integrity within a small area, and the growth conditions need to be further improved.