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借助EDX、XRD、SEM及纳米压痕研究了采用磁控溅射技术制备的TiN和Ti-Si-N涂层的微观组织结构和力学性能。研究表明:TiN和Ti-Si-N涂层均呈面心立方结构,Si元素的加入使TiN涂层的组织形貌由柱状晶结构转变为Si3N4界面相包裹纳米晶TiN的纳米晶复合结构;由于界面强化效应,Si的加入使涂层的硬度显著增加;涂层的应力也随着Si元素的加入而增加;Si的加入使TiN涂层的抗氧性得到明显改善。
The microstructures and mechanical properties of TiN and Ti-Si-N coatings prepared by magnetron sputtering were studied by means of EDX, XRD, SEM and nanoindentation. The results show that both TiN and Ti-Si-N coatings have a face-centered cubic structure. The addition of Si can transform the morphology of the TiN coating from columnar to nanocrystalline with Si3N4 interface and nanocrystalline TiN. Due to the strengthening effect of the interface, the hardness of the coating increases significantly due to the addition of Si; the stress of the coating also increases with the addition of Si; the addition of Si makes the TiN coating significantly improve the oxidation resistance.