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文章用最小二乘法和实验的方法建立了被测距离和电涡流式微位移传感器的输出电压之间的函数关系,并给出了该函数关系与实验数据之间的误差。文中也对该传感器进行了重复性和迟滞性误差分析,最后给出了该电涡流传感器的总测量精度。
The least squares method and experimental method are used to establish the relationship between the measured distance and the output voltage of the eddy current micro-displacement sensor. The error between this function and the experimental data is given. In this paper, the repeatability and hysteresis error of the sensor is also analyzed. Finally, the total measurement accuracy of the sensor is given.