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针对单微悬臂梁生化检测系统中存在的温度漂移、溶液折射率变化等环境噪声影响和不能多目标检测等问题,设计制作了一种基于垂直腔面射型激光器阵列(VCSELs)的新型微悬臂梁阵列生化传感系统。利用双透镜组光路汇聚激光器阵列发出的激光束,依次照射到微悬臂梁阵列尖端进行精确定位扫描,实现了5根微悬臂梁变形信号的同步检测。该系统具有灵敏度高、一致性好、检测快速等优点。通过升降温动态实验测试,验证了该系统的稳定可靠性。上述结果为微悬臂梁阵列式生化传感技术的开展提供了一种新的方法和平台。
Aiming at the problems of environmental noise such as temperature drift and refractive index change of single microcantilever detection system and the problem of multi-target detection, a new micro-cantilever based on vertical cavity surface-emitting laser arrays (VCSELs) Beam Array Biochemical Sensing System. Using the laser beam emitted by the converging laser array of the two-lens assembly, the laser beam is sequentially irradiated to the tip of the micro-cantilever array to perform accurate positioning and scanning, and the synchronous detection of five micro-cantilever deformation signals is achieved. The system has the advantages of high sensitivity, good consistency and fast detection. Through the dynamic and dynamic test of heating and cooling, the stability of the system is verified. The above results provide a new method and platform for micro-cantilever array biochemical sensing technology.