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对微泵膜片在静电力驱动下产生的形变和由此引起的微泵腔体体积的变化进行了计算机模拟分析，得出了膜片厚度、形状和静电驱动电压对微泵胶体体积变化的影响，以及膜片振动的固有频率与膜片厚度之间的关系．研究结果为微泵结构的设计优化提供了依据．
The deformation of the micro-pump diaphragm under the electrostatic force and the change of the volume of the micro-pump chamber caused by the electrostatic force were simulated by computer. The effects of the thickness and shape of the diaphragm and the electrostatic driving voltage on the volume change of the micro-pump were obtained Influence, and the relationship between the natural frequency of diaphragm vibration and diaphragm thickness. The results provide the basis for the design optimization of the micro-pump structure.