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共焦显微术是一种重要的微小物体成像技术,由于具有高精度、高分辨率及容易实现三维重构图像的优势而被广泛应用于微纳三维形貌测量。近年来,并行共焦显微检测技术引起各国专家的广泛关注,该技术将单点扫描变为多路同时并行探测,大大提高了三维检测速度。综述了并行共焦显微检测技术的基本原理,系统论述了近年来国内外在并行共焦显微检测技术方面的研究进展以及作者在这方面的研究。按照实现并行检测的方法对7种并行共焦显微检测技术进行了分类介绍,并指出了各种方法的优缺点。最后总结了目前存在的技术难题,分析了未来的发展趋势,为我国进一步开展此项研究提供技术参考。
Confocal microscopy is an important micro-object imaging technology, which is widely used in the measurement of micro-nano three-dimensional topography because of its advantages of high precision, high resolution and easy realization of three-dimensional reconstruction images. In recent years, parallel confocal microscopy has attracted the attention of many experts from all over the world. The technology turns single-point scanning into multiple simultaneous detection and greatly improves the speed of 3D detection. In this paper, the basic principle of parallel confocal microscopy is reviewed. The research progress of parallel confocal microscopy at home and abroad is systematically discussed and the author’s research in this field is also discussed. According to the method of parallel detection, seven kinds of parallel confocal microscopic detection techniques are classified and introduced, and the advantages and disadvantages of various methods are pointed out. At last, the existing technical problems are summarized, the future development trends are analyzed, and the technical reference is provided for our further research in this field.