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采用了不同能量的单脉冲和多脉冲飞秒激光对LiNbO3晶体进行烧蚀,并刻蚀了表面衍射型光栅.通过扫描电镜和原子力显微镜观察了烧蚀点的形貌特征,首次发现利用单束飞秒激光脉冲对LiNbO3晶体烧蚀,可以得到超衍射极限的烧蚀点,当聚焦光斑直径约为2μm、能量为170nJ的单脉冲飞秒激光作用时,烧蚀点的直径约为400nm,100nJ,17个脉冲作用时烧蚀点的直径约为800nm.同时可以观察到在能量较低的多脉冲飞秒激光作用下,LiNbO3晶体呈现出大约200nm周期性分布的波纹状结构.实验结果表明,选择合适参数的飞秒激光脉冲可以对LiNbO3晶体进行超衍射极限加工,这对于利用飞秒激光制作LiNbO3基质的微纳光电子器件有十分重要的意义.
Single-pulse and multi-pulse femtosecond lasers with different energies were used to ablate LiNbO3 crystals and the surface diffraction grating was etched.The morphology of the ablation points was observed by scanning electron microscopy and atomic force microscopy, Femtosecond laser pulse ablation of LiNbO3 crystals can be super-diffraction limit ablation point, when the focal spot diameter of about 2μm, the energy of a single pulse of femtosecond laser 170nJ ablation point diameter of about 400nm, 100nJ , And the diameter of the ablation point is about 800 nm when 17 pulses are applied.At the same time, it can be observed that the LiNbO3 crystal exhibits a periodic distribution of about 200 nm under the low energy multi-pulse femtosecond laser.The experimental results show that, Choosing the appropriate parameters of the femtosecond laser pulse can super-diffraction limit LiNbO3 crystal processing, which for the use of femtosecond laser LiNbO3 matrix micro-nano optoelectronic devices have very important significance.