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一、序言超精密测长或精确定位的激光干涉装置,由于频率稳定的双频激光器问世,大大增加了其实用性。近年来,作为工业领域中一种实用的光学精密测量仪得到了迅速的发展。激光干涉装置的测长精度,取决于激光波长的稳定性。最新颖的装置,可与物理标准相匹敌,达到±0.1ppm。即一米长度的测量精度是±0.1μm。由于其重复性好,给人类提供了高精度、高稳定的长度和比较标准。
First, the preamble Super precision measuring length or precise positioning of the laser interference device, due to the advent of dual-frequency laser frequency stability, greatly increased its usefulness. In recent years, as a practical optical precision measuring instrument in the industrial field has been rapid development. The length measurement accuracy of the laser interferometer depends on the stability of the laser wavelength. The most innovative device, comparable to physical standards, to ± 0.1ppm. The measurement accuracy of one meter length is ± 0.1μm. Because of its repeatability, provides humanity with high precision, high stability of the length and comparison standards.