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含氟的复合磨料在工业上已广泛应用,利用X-射线衍射、扫描电镜、激光粒度仪和原子力显微镜等测试手段,比较了不同掺氟方式和氟源得到含氟复合磨料的物性,以及对单晶硅的抛光效果和抛光表面性能的影响。结果表明,在80℃共沉淀、以掺氟量为7%掺入氟化物及1000℃下煅烧所得复合磨料具有较低的振实密度、粒度均匀的球型粒子,复合磨料中CeLa2O3F3含量相对较高,用于单晶硅的抛光可以得到较好的抛光表面性能;碳酸稀土直接喷撒氢氟酸在同等煅烧下制得复合磨料其抛光速率较高,但抛光表面性能较差。
The fluorine-containing composite abrasive has been widely used in industry. The physical properties of the fluorine-containing composite abrasive obtained by different fluorine-containing methods and fluorine sources were compared by means of X-ray diffraction, scanning electron microscopy, laser particle size analyzer and atomic force microscope. The effect of single crystal silicon polishing and polishing surface properties. The results showed that the content of CeLa2O3F3 in the composite abrasive was relatively lower than that of the spherical abrasive with co-precipitation at 80 ℃, the incorporation of fluoride with 7% fluorine content and the calcined composite abrasive at 1000 ℃ with lower tap density and uniform particle size High, for single-crystal silicon polishing can get better polishing surface properties; rare earth carbonate directly spray hydrofluoric acid in the same calcined compound abrasive polishing rate is higher, but the polished surface performance is poor.