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多元硬质膜层以其高硬度、抗磨损性及抗高温氧化性能显著提高了工件表面的服役性能,然而其过高的摩擦系数(0.4-0.9)引起了膜层的严重磨损。采用等离子增强PVD(物理气相沉积)技术在高速钢基体表面沉积C掺杂的Si-C-N以及Ti-Al-Si-C-N五元硬质膜层,并利用SEM、XPS、TEM、MH-5显微硬度仪以及摩擦磨损试验仪研究了C掺杂对膜层显微组织、力学性能的影响规律。结果表明:C的掺杂显著改善了膜层的显微组织,膜层硬度可达41GPa以上,尤其是膜层的耐磨减摩性能得到了极大的提高,摩擦系数低至0.2以下,且在测试过程中,膜层并没有发生剥落、撕裂等显著的破坏形式。
Due to its high hardness, wear resistance and high temperature oxidation resistance, the multi-layer hard coating significantly improves the workability of the workpiece surface. However, the excessive friction coefficient (0.4-0.9) causes serious wear of the coating. C-doped Si-CN and Ti-Al-Si-CN five-membered hard coatings were deposited on the surface of high-speed steel substrate by plasma enhanced PVD (physical vapor deposition) technique. SEM, XPS, TEM and MH- Microhardness tester and friction and wear tester to study the C doping on the film microstructure, mechanical properties of the law. The results show that the doping of C significantly improves the microstructure of the coating, the hardness of the coating can reach over 41GPa, especially the abrasion and friction reducing properties of the coating have been greatly improved, the friction coefficient is as low as 0.2 or less, During the test, the film did not suffer any significant damage such as spalling or tearing.