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本文提出了一种灵敏度高、线性好,用于300Pa压力测量的压阻式微型压力传感器。为减小非线性,这种传感器采用了由4个弹性梁和一个刚性中心膜构成的膜片结构。本文讨论了该传感器的有限元仿真、制作工艺和传感器特性等问题。
This paper presents a piezoresistive miniature pressure sensor with high sensitivity and good linearity for 300Pa pressure measurement. To reduce the non-linearity, this sensor uses a diaphragm structure consisting of 4 elastic beams and a rigid center membrane. This paper discusses the finite element simulation of the sensor, manufacturing process and sensor characteristics and other issues.