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研究了移相式红外泰曼 格林干涉仪,研制出光机电算一体化的仪器,仪器孔径为Φ30mm。编制了计算机软件,用于干涉图波面的拟合与红外光学系统成像质量的评价,所编软件与国际上同类软件的计算精度相当。介绍了红外干涉仪的多种应用:评价红外光学系统的像质,检测光学件精磨表面粗糙度、光盘基片面形的平整度。结果表明,仪器干涉系统光学质量优于λ/25,扩展不确定度优于λ/130,重复性优于λ/200(λ=10.6μm)。
The phase - shifting infrared thermal imaging system is studied. The aperture of the instrument is Φ30mm. The computer software was compiled for the fitting of the interferogram and the evaluation of the imaging quality of the infrared optical system. The compiled software is equivalent to the computational accuracy of similar software in the world. A variety of applications of the infrared interferometer are introduced: evaluating the image quality of the infrared optical system, detecting the roughness of the surface of the optical component and the flatness of the surface of the optical disc substrate. The results show that the optical quality of the interferometer system is better than λ / 25, the extended uncertainty is better than λ / 130 and the repeatability is better than λ / 200 (λ = 10.6μm).