采用冷壁化学气相沉积系统,利用H2还原WF6工艺,在纯铜管表面制备获得了高纯钨材料。在440°C沉积温度下,得到具有混合相的钨管,其压缩性能远低于在540°C条件下得到的只具有α相的钨管。由此表明,β-W的出现极大地降低了钨管的压缩性能。在400°C条件下,对具有混合相的钨管进行1h保护气氛退火后,钨管材料中的β相消失,同时其压缩性能与只具有α相的沉积态钨管相近。 Using cold wall chemical vapor deposition system, using H2 reduction WF6 process, obtained in the pure copper tube surface high purity tungsten material. At a deposition temperature of 440 ° C, a tungsten tube with a mixed phase was obtained with much lower compressive properties than a tungsten tube with alpha phase only at 540 ° C. This shows that the presence of β-W greatly reduces the compression properties of tungsten tubes. At 400 ° C, the tungsten phase in the mixed phase was annealed in a protective atmosphere for 1h, the β phase in the tungsten tube disappeared and its compressibility was close to that of the as-deposited tungsten tube with α phase only.