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选择廉价的六甲基乙硅胺烷((Me_3Si)_2NH)和氨气为原料,采用正交设计试验参数的方法,研究了激光功率密度、六甲基乙硅胺烷蒸汽流量、氨气流量对粉体化学组成的影响。制备出低游高碳含量,高Si_3N_4含量的Si_3N_4/SiC粉体。研究结果表明,在选定的试验参数范围内,形成的粉体中Si_3N_4、SiC的相对含量在较大的范围内变化。对Si_3N_4粉体中Si_3N_4的形成影响最大的是激光功率密度,六甲基乙硅胺烷流量对其影响最小。通过试验得到了高Si_3N_4含量,低游离碳含量的Si_3N_4/SiC纳米粉形成的最佳工艺参数。
The method of orthogonal experimental design was used to study the effects of laser power density, hexamethyldisilazane vapor flow rate, ammonia gas flow rate Impact on the chemical composition of the powder. Si_3N_4 / SiC powders with high Si 3 N 4 content were prepared. The results show that the relative content of Si_3N_4 and SiC in the formed powders varies in a wide range within the selected experimental parameters. The laser power density is most affected by the formation of Si_3N_4 in Si_3N_4 powder, and the influence of hexamethyldisilazane flow is the least. The optimal process parameters of Si_3N_4 / SiC nanopowders with high Si_3N_4 content and low free carbon content were obtained through experiments.