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提出一种为MEMS振动陀螺仪设计的驱动和检测接口电路。第一步采用通用级和TIA得到低噪声C/V转换,同时集成采样率1.25 MS/s的14位SAR-ADCs,将驱动和感应模式的信号转换到数字域。采用这种策略,模拟电路的复杂性被降低,数字域的信号可以更精确操作。此接口适用于共振频率为3~15 kHz的MEMS陀螺仪。此电路在0.18μm CMOS工艺流片。实验结果显示,在3.5 kHz频率下,输出电容的噪声密度为0.03aF/√Hz。
A drive and detection interface circuit designed for MEMS vibrating gyroscope is proposed. The first step is a low noise C / V conversion using a common stage and TIA while integrating 14-bit SAR-ADCs with a 1.25 MS / s sampling rate to convert the drive and sense mode signals to the digital domain. With this strategy, the complexity of the analog circuit is reduced and the digital domain signals can operate more accurately. This interface is suitable for MEMS gyroscopes with a resonance frequency of 3 to 15 kHz. This circuit is in 0.18μm CMOS process chip. Experimental results show that the noise density of the output capacitor is 0.03aF / √Hz at a frequency of 3.5 kHz.