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本文中利用电化学工作站与摩擦试验机研究了DLC薄膜与Si-DLC薄膜在去离子水和硝酸环境下的腐蚀摩擦行为,并通过动电位极化和电化学交流阻抗测试研究了两种薄膜的电化学腐蚀性能,结合磨损试验结果综合分析了两种薄膜在硝酸环境下的腐蚀磨损机理.结果表明:Si掺杂增加了薄膜在硝酸环境下的腐蚀电流密度;减小了DLC薄膜在去离子水和硝酸环境下的摩擦系数;磨损结果分析发现机械磨损是造成薄膜损伤的最主要因素,腐蚀-磨损的相互作用约占薄膜总磨损量的4%,其影响作用不可忽视.
In this paper, the corrosion behavior of DLC film and Si-DLC film in deionized water and nitric acid environment was investigated by electrochemical workstation and tribometer. The effects of polarization and electrochemical impedance spectroscopy Electrochemical corrosion performance and combined with the wear test results, the corrosion and wear mechanism of the two films in nitric acid environment are analyzed.The results show that Si doping increases the corrosion current density of the film in nitric acid environment, Water and nitric acid environment. The results of wear analysis found that mechanical wear was the most important factor of film damage. The interaction between corrosion and wear accounted for about 4% of the total wear of film, and its influence could not be neglected.