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介绍在中国原子能科学研究院HI 13串列加速器上,对α Si1-xCx∶H薄膜样品进行弹性反冲探测分析的方法和结果.用该加速器提供的高品质127I束流轰击α Si1-xCx∶H薄膜材料样品,用ΔE(gas) E(PSD)望远镜探测器,在前角区(30°角)测量从该样品中反冲的各元素的能谱.然后用离子束分析(IBA)程序SIMNRA对能谱进行拟合,得到样品中H,C和Si的比分及深度分布.
Methods and results of elastic recoil detection analysis of α Si1-xCx:H thin film samples at HI 13 Tandem Accelerator of China Institute of Atomic Energy are presented.A high quality 127I beam provided by the accelerator is used to bombard the α Si1-xCx: H thin film material samples, energy spectrum of each element recoil from the sample was measured in the front corner region (30 ° angle) using a ΔE (gas) E (PSD) telescope detector, and then ion beam analysis (IBA) SIMNRA fitted the spectra to get the H, C and Si scores and depth profiles of the samples.