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为了监控大规模集成电路研制工艺过程中的钠沾污,建立一个简单、方便、准确的测定痕量钠的方法是十分必要的。 本文描述了一个用火焰发射方式测定痕量钠的方法。采用日历508型原子吸收分光光度计和空气——乙炔火焰,在原来0～10ng/ml钠含量测定的基础上,通过降低空白、净化环境气氛等改进措施提高信噪比,实现了0～1.0ng/ml钠含量的火焰发射测定。其相对标准偏差为3.2～8.4％。仪器的最低检测极限可达0.0012ng/ml。 本方法已应用于检测大规模集成电路工艺用高纯水中钠含量的变化和环境气氛中的钠沾污,其结果是令人满意的。
In order to monitor sodium contamination during the development of large scale integrated circuits, it is necessary to establish a simple, convenient and accurate method for the determination of trace sodium. This article describes a method for the determination of trace sodium by flame emission. Using the calendar 508 atomic absorption spectrophotometer and the air-acetylene flame, based on the original 0 ~ 10ng / ml sodium content determination, the signal to noise ratio was improved by reducing the blank and purifying the atmosphere, ng / ml sodium content of the flame emission measurement. The relative standard deviation of 3.2 ~ 8.4%. Instrument detection limit of up to 0.0012ng / ml. This method has been applied to the detection of sodium content in high purity water for large-scale integrated circuit processes and sodium contamination in the ambient atmosphere, and the results are satisfactory.