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在半导体行业,空气中的悬浮气态分子污染物对于制程的潜在危害越来越受到人们的重视。目前,在通风系统中使用化学过滤器是去除AMC的主要方法之一。结合工程实例,介绍了半导体行业在新风处理单元中加装化学过滤器的实际效果。
In the semiconductor industry, suspended gaseous molecular pollutants in the air have drawn more and more attention to the potential hazards of the process. Currently, the use of chemical filters in ventilation systems is one of the main ways to remove AMCs. With practical examples, the practical effect of installing chemical filters in the fresh air treatment unit in the semiconductor industry is introduced.