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分析了基于法布里珀罗腔的微光机电系统可调谐滤波器中 ,空气腔厚度与峰值波长间的关系。微光机电系统中 ,空气腔的厚度一般在一个波长附近 ,因此腔的干涉级数较小 ,两边反射镜的反射相位对峰值波长的影响比较大。从反射相位出发 ,推导出了基于这种结构的可调谐滤波器中空气腔厚度和谐振波长之间的线性关系 ,并通过数值计算进行了验证。分析了影响滤波器调谐灵敏度的因素 ,构成介质反射镜的薄膜材料的高低折射值以及薄膜堆的层数都能改变线性系数的值。最后估算了一定波长范围内这种线性关系的误差。
The relationship between the cavity thickness and the peak wavelength in the Fabry-Perot cavity-based micro-electro-mechanical system tunable filter is analyzed. In the MEMS, the thickness of the air cavity is generally around a wavelength, so the interference level of the cavity is small, and the reflection phase of the two mirrors has a greater impact on the peak wavelength. Based on the reflection phase, the linear relationship between the cavity thickness and the resonant wavelength in the tunable filter based on this structure is deduced and verified by numerical calculation. The factors affecting the tuning sensitivity of the filter are analyzed. The values of the linear coefficients can be changed by the high and low refraction values of the thin film materials and the layers of the thin film stack. Finally, we estimate the error of this linear relationship within a certain wavelength range.