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本发明提供一种单芯片双轴水平光纤加速度传感器及其制备方法,包括:在第一基底上形成两个敏感方向相互正交的、对水平加速度敏感的单轴加速度敏感单元,单轴加速度敏感单元包括微反光镜、弹性梁以及光高反射膜,在第二基底表面形成微反光镜扭转空间;将第一基底与第二基底键合;对双轴加速度敏感芯片和光纤准直器进行光学耦合封装。本发明将两个敏感方向正交的单轴加速度敏感芯片集成在同一衬底上,且光信号的传输在双轴加速度敏感芯片一侧,大大简化了基于MEMS技术的单芯片双轴加速度传感器的封装。
The present invention provides a single-chip biaxial horizontal optical fiber acceleration sensor and a method for manufacturing the same. The method includes: forming two uniaxial acceleration-sensitive units that are sensitive to horizontal acceleration and have a single axis acceleration-sensitive The unit comprises a micro-mirror, an elastic beam and a light-reflecting film. The micro-mirror twisting space is formed on the surface of the second substrate. The first substrate is bonded to the second substrate. The biaxial acceleration-sensitive chip and the optical fiber collimator are optically Coupling package. In the invention, two uniaxial acceleration sensitive chips with orthogonal sensitive directions are integrated on the same substrate, and the transmission of the optical signal is on the side of the biaxial acceleration sensitive chip, which greatly simplifies the MEMS technology-based single-chip biaxial acceleration sensor Package.