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This paper presents mathematical formulae showing that the distance mismatch for an uncentered proof mass in an accelerator sensor does not influence the linearity of the closed-loop accelerometer as a whole.This asymmetry in sensors only introduces an output voltage offset in the readout integrated circuit.Numerical simulation using Matlab/Simulink confirms the mathematical conclusion.The linear response after compensation with a conventional capacitor array is also simulated and analyzed.Results show that there is a loss in linearity.Similar results hold not only for the continuous-time architecture,but also for a time-divided architecture.A readout integrated circuit with a time-divided architecture is designed and fabricated using a 0.35μm HV CMOS process.An accelerometer composed of a microelectromechanical system sensor with severe built-in distance mismatch and the designed readout integrated circuit is tested.Test results show that the nonlinearity of such accelerometer is within 0.3%.
This paper presents an analog formulae showing that the distance mismatch for an uncentered proof mass in an accelerator sensor does not influence the linearity of the closed-loop accelerometer as a whole. This asymmetry in sensors only introduces an output voltage offset in the readout integrated circuit. Numerical simulation using Matlab / Simulink confirms the mathematical result. Linear response after compensation with a conventional capacitor array is also simulated and analyzed. Results show that there is a loss in linearity. Similar results hold not only for the continuous-time architecture, but Also for a time-divided architecture. A readout integrated circuit with a time-divided architecture is designed and fabricated using a 0.35 μm HV CMOS process. An accelerometer composed of a microelectromechanical system sensor with severe built-in distance mismatch and the designed readout integrated circuit is tested. Test results show that the nonlinearity of such accelerometer is wit hin 0.3%.