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双光子聚合(TPP)是通过光敏剂中的非线性双光子吸收过程所引发的,其作为一种新工艺,自问世以来,已在二雏和三维加工聚合应用领域中得到广泛研究．对于二维纳米图案的加工,纳复制工艺已经演变为体素模板扫描方法．该方法用黑白双色2块图作为设计图案,并转排成体素模板以控制聚焦激光素的开关．复杂的三维微结构也可以采用多重断面分层叠加的方法进行加工,各断面的扫描数据从三维CAD数据中得到．在聚合反应后,没有固化的液态树脂,其采用在树脂上浇注类似于酒精之类溶剂的方法去除,从而显露出聚合的微结构．在前期的工作中,已经成功地加工出了高空间分辨力的三维微光学器件,分辨力约为100nm．微机械器件和光子晶体等的近期研究工作提高了其TPP的效率和精度．介绍了近来开发的基于TPP的一些微加工工艺．
Two-photon polymerization (TPP) is triggered by the non-linear two-photon absorption process in photosensitizers. As a new process, TPP has been extensively studied in the field of second-generation and three-dimensional processing polymerization since its publication. For the processing of two-dimensional nano-patterns, nano-replication process has evolved into a voxel template scanning method. The method uses black-and-white two-color images as a design pattern and transforms into a voxel template to control the switching of focused laser light. The complicated three-dimensional microstructure can also be processed by the method of multi-section and layer-by-layer stacking, and the scanning data of each section can be obtained from the three-dimensional CAD data. After the polymerization reaction, there is no cured liquid resin, which is removed by pouring a solvent such as alcohol onto the resin to reveal the polymerized microstructure. In the previous work, we successfully processed three-dimensional micro-optic devices with high spatial resolution with a resolution of about 100 nm. Recent research efforts on micromechanical devices and photonic crystals have increased the efficiency and accuracy of their TPP. Some recently developed micromachining processes based on TPP are introduced.